Browsing Masters Degrees (Physics) by Author "Meyer, Kevin Alan."
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Two-dimensional plasma sheath observations in plasma source ion implantation.
Meyer, Kevin Alan. (1996)Plasma Source Ion Implantation (PSII) is the process of implanting high energy ions [10-50 keV] into metallic targets, by pulsing them negatively whilst immersed in a background plasma. PSII achieves surface hardening, ...